APPLIED MATERIALS Centura TPCC EPN
APPLIED MATERIALS Centura TPCC EPN
- Serial Number 21693; Manufactured in 2011
- Electro Polished Nickel Frame & Modules
- 2ea ENP Centura Loadlocks for 200mm Wafers
- Wafer Transfer Chamber with HP Robot
- High Temperature Quartz End Effector
- On the Fly Wafer Centering
- 2ea TanOx Chambers - Positions C & D
- 2ea ENP Fast Cooldown Chambers
- V452 Main Control Board
- Gas Panel with 2ea Gas Pallets
- Interconnect Cables
- AC Distribution Rack – 160A
- Through the Wall Installation Kit
- Please Inquire for Additional Details
1 unit @ Best Price
MAKE: Applied Materials
MODEL: Centura TCPP
CATEGORY: Cluster PECVD Tools
SELLER: Catalyst Equipmt Co
Austin, TX US
SPECS
| Manufacturer | Applied Materials |
| Model | Centura TCPP |
| Wafer Size Range | |
| Minimum | 150 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Number of Chambers | 2 |
| Controller Type | PC/VME |
| Process Gases | 2ea Pallets |
| Condition | Very Good |
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