EPI 39 - AMAT EPI CENTURA
Software Ver: B6.50
CB1 Amps: 300A
Vita Controller
Flow Point Model: Nano Valve
Gas Panel Type: Configurable
Wafer Size: 200mm (with conversion kit 150mm is possible)
M-Monitor: CRT
3 Chambers ATM EPI
With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)
Standard pneumatic waferlift
Center Finding System: OTF
Buffer robot: HP+
Piezocon sensor: No
VSB: Yes
Wide Body LL
Tool called "EPI39"
1 unit @ Best Price
MAKE: AMAT
MODEL: AMAT EPI CENTURA
CATEGORY: Epitaxial Cluster Tools
SELLER: Infineon
Villach, Österreich
SPECS
| Manufacturer | AMAT |
| Model | AMAT EPI CENTURA |
| Wafer Size Range | |
| Minimum | 150 mm |
| Maximum | 200 mm |
| Set Size | 150 mm |
| Number of Chambers | 3 |
| Controller Type | Other Controller Type |
| Cassette to Cassette | YES |
| Extended Description | Details at Konfiguration und Part list EPI39.xlsx |
| Power Requirements | 480 V 120.0 A 50 Hz 3 Phase |
| Year of Manufacture | 2006 |
| Condition | Good |
S&H
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
Payment
100% downpayment