Accent Optical Technologies QS-2200A FT-IR Spectrometer

Accent  Optical Technologies QS-2200A FT-IR Spectrometer

• KBR Optical Components
• Reflective Measurement of Epitaxial Silicon Thickness
• Automatic Wafer Handling
  • Genmark Robot with Integrated Flatfinder & Controller
  • Dual Cassette Platforms for up to 200mm Wafers
  • ACCENT Robot Interface
  • ACCENT 013-4738-2 Stage Controller
  • ACCENT 013-4758-2 AC Power Box
  • Control PC Running Windows XP OS
  • ACCENT GUI Application Software
  • SECS/GEM Interface Software