ITEM ID: 87228

Alcan Tech/Canon MAS-8000

Plasma Photoresist Stripper Microwave Ashing System

1 unit @ Best Price

MAKE:

MODEL: MAS-8000

CATEGORY: Single Wafer Resist Strippers

SELLER: Catalyst Equipmt Co

Plano, TX US

SPECS

Model MAS-8000
Wafer Size Range
Maximum 200 mm
Set Size 200 mm
Other Information
  • Serial Number 81456
  • Heated & Water Cooled Platen for up to 200mm Wafers
  • Dual Cassette Load/Unload Platforms
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  • MKS 252C-11009 Throttle Valve Controller
  • ALCAN TECH HC-1000 Heater Controller
  • ALCAN TECH PDA-801 Controller
  • ALCATEL ADS-301 Dry Vacuum Pump/Blower Package
  • Stainless Steel System Vacuum Plumbing
  • Facilities Plumbing Cabinet
  • Main Power Circuit Breaker Cabinet

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