Axcelis NV8250HT #941

Equipment Konfiguration: Type:NV8250HTEnergy Config:0 - 250Kv MidcurrentSerialnumber:908Build Year:2002Date of first usage:buyed new from vendorCurrent Condition: GoodCE-Conformity:YesLocation:greyroomVoltage:208VCryo-Pumps:3x CTI/Edwards Onboard: OB-8Cryo-Kompressor:CTI 9650 Low-VoltageTurbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003CRough-Pumps:Edwards: without QDP40, not includedEndstation Rough-Pump:not includedWafersize:8inch(200mm)Clamp-Type:E-Chuck green with Non-µC ControllerWafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)Gasbox:Modular 5-String, 4x 2,0L SizeString1:Argon Carriergas; MFC Unit-1662 2sccm BF3String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3Beam-Profiler Type:Belt-DriveGear-Type's:Scan: Planetary  Tilt: PlanetarySource-Type:ELS4 IHC-Source without VaporizerHV-Transformer:Silicon-OilLight-Tower:red/yellow/green; no buzzerMain-WorkstationSolaris SUN AXI 3HE (Special case)Second-WorkstationSolaris SUN Sparc5Software-Version:5.1.4.1Network:24port 100MB Ethernet with Cisco Router-KitCell-Controller:177 TypeNotes:Upper-Rack Panel missing Clean-Room Table missing on frontside all 4 wheels on oil-isolation transformer are broken Minor modifications on tool No Manual-Set/ no Spares include tool was used 24/7 full in production between 15 and 230kv Energy If required, tool can be inspected on site, but no Power