Other Ion Beam Equipment
KAUFMAN & ROBINSON END-HALL ION SOURCE WITH WATER COOLED FRONT PLATE
Gridless End-Hall Ion Source With Water Cooled Front Plate
Ion Implantation & Beam Tools
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High Current Implanters
AMAT E500
› Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP› OEM Serial ID?ES193741 U2› Completeness: Total/partial/Donor tool? Please list missing parts.Total› Date of first usage?NA› Technic special customized for Infineon?NA› Correct maintained?Yes› Any damages/deficits known?No› Manuals existing?No› Crated: If yes…/ professional with protocol / partly / simple?No› Detailed Configuration/Specification of the tool › Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS› Useable for which products?8" Thin Taiko wafers› Wafer size (if applicable)?200mm› Any consumables at end of lifetime?Yes (source, electrode)› Procured from OEM or from second hand?From IR Singapore› Any refurbishments done?No› Any doubts that the tool is failure free useable for the next three years?Yes› Was there a significant system failure in the last three years?No› Any contaminations known?BF3, H2› IFX inventory200016809location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM -
High Current Implanters
Implanter Varian Viision 200+
200 mm Implanter in very good condition
Price net 982k$ based on Incoterm FCA, as is without warranty
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Medium Current Implanters
Axcelis NV8250HT #941
Equipment Konfiguration: Type:NV8250HTEnergy Config:0 - 250Kv MidcurrentSerialnumber:908Build Year:2002Date of first usage:buyed new from vendorCurrent Condition: GoodCE-Conformity:YesLocation:greyroomVoltage:208VCryo-Pumps:3x CTI/Edwards Onboard: OB-8Cryo-Kompressor:CTI 9650 Low-VoltageTurbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003CRough-Pumps:Edwards: without QDP40, not includedEndstation Rough-Pump:not includedWafersize:8inch(200mm)Clamp-Type:E-Chuck green with Non-µC ControllerWafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)Gasbox:Modular 5-String, 4x 2,0L SizeString1:Argon Carriergas; MFC Unit-1662 2sccm BF3String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3Beam-Profiler Type:Belt-DriveGear-Type's:Scan: Planetary Tilt: PlanetarySource-Type:ELS4 IHC-Source without VaporizerHV-Transformer:Silicon-OilLight-Tower:red/yellow/green; no buzzerMain-WorkstationSolaris SUN AXI 3HE (Special case)Second-WorkstationSolaris SUN Sparc5Software-Version:5.1.4.1Network:24port 100MB Ethernet with Cisco Router-KitCell-Controller:177 TypeNotes:Upper-Rack Panel missing Clean-Room Table missing on frontside all 4 wheels on oil-isolation transformer are broken Minor modifications on tool No Manual-Set/ no Spares include tool was used 24/7 full in production between 15 and 230kv Energy If required, tool can be inspected on site, but no Power -
Medium Current Implanters
Amat E500
-Back end medium current Implanter
- 100002956
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Medium Current Implanters
AXCELIS NV8200P
MCINV8202
› Original Equipment Manufacturer? Axcelis
› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200
› A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.
› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.
› Completeness: Total/partial/Donor tool? Please list missing parts. 95 percent complete. Only few items were taken example the turbo pump controllers.
› Date of first usage? 2006
› Technic special customized for Infineon? We don’t use water cool for the platen.
› Correct maintained? Yes.
› Any damages/deficits known? No
› Manuals existing? Yes.
› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.
› Any upgrades / extensions? No.
› Useable for which products? 8 inch product
› Wafer size (if applicable)? 8 inch
› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.
› Procured from OEM or from second hand? Second hand.
› Any refurbishments done? No.
› Any doubts that the tool is failure free useable for the next three years? No.
› Was there a significant system failure in the last three years? No.
› Any contaminations known? No
› IFX Inventory number? 100001850
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Medium Current Implanters
AXCELIS NV8200P
-MCINV8201
› Original Equipment Manufacturer? Axcelis
› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200
› OEM Serial ID?
› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.
› Completeness: Total/partial/Donor tool? Please list missing parts. 95 percent complete. Only few items were taken example the turbo pump controllers.
› Manufacturing date of the Equipment ?
› Date of first usage? 2006
› Technic special customized for Infineon? We don’t use water cool for the platen.
› Correct maintained? Yes.
› Any damages/deficits known? No
› Manuals existing? Yes.
› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.
› Any upgrades / extensions? No.
› Useable for which products? 8 inch product
› Wafer size (if applicable)? 8 inch
› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.
› Procured from OEM or from second hand? Second hand.
› Any refurbishments done? No.
› Any doubts that the tool is failure free useable for the next three years? No.
› Was there a significant system failure in the last three years? No.
› Any contaminations known? No
› IFX Inventory number? 100000605
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High Current Implanters
AXCELIS_OPTIMA_HD