ITEM ID: 256920

Implanter Varian Viision 200+

200 mm Implanter in very good condition

Price net 982k$  based on Incoterm FCA, as is without warranty

1 unit @ $982,000.00

MAKE: Varian

MODEL: Viision 200+

CATEGORY: High Current Implanters

SELLER: Infineon

Villach, Austria

SPECS

Manufacturer Varian
Model Viision 200+
Description Implanter
Accessories

Implant Disc 13 Site, Silicon Coated

Two-dimensional beam profiler

General:Comment IComment II
Model/TypeViision 200+
Ser.#ES078108
Manufacturing Year1997
WaferSize200mm ( 8inch )
Implant Disc13 Site, Silicon Coated
Two-dimensional beam profiler
CE-Markyes
Computer System147MHz Main & ES CPU
Cleanroom MonitorTFT
Remote Service Monitornot included
Source/Beamline
Source Chamber Shield Kityes1 included
Bernas Sourceyes1 Spare available, on request
Mass Slit Shield Retrofitno
Implant:
New Infranor Amplifier Xtra Pulsyes
Spin Amp Kollmorgen Servo Star S700yes
Vacuum:
Terminal Rough Pumpnot includedEdwards SetUp
Terminal Differential PumpMembran Pump
Source TurboPfeifferHiPace 1500C
Beamline TurboPfeifferTPH 1201 U P
Endstation Manifold Turbo PumpPfeifferHiPace 300
Endstation Rough Pumpnot includedEdwards Setup
Endstation Differential PumpMembran or Scroll Pump
Cryo Compressor (2x)CTI 9600
Cryo Pump (4x)CTI 250F
4th cryo pump installedyes
50 Hz Frequency Kityes
Additional Information:
No Roughing Pumps included
No Remote TFT included
Gasbox: calibrated for:
String #1 - SDSMKS-P2A10 sccm Phosporus
String #2 - SDSUNIT 166210 sccm Arsine
String #3 - HPMKS-P2A10 sccm BF3
String #4 - HPTylan FC-290010 sccm Argon
PFGUnit 81605 sccm Xe
External Inert Gas Feed and Purge

Other Information

Serial ID: ES078108

Condition Very Good
Year of Manufacture 1997

S&H

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

Payment

100% downpayment