Sample Coaters
ANATECH HUMMER 6.6T SPUTTER SYSTEM
Sputter System
Sample Coaters
Sputter System
Dispensing/Coating Equipment
Dispensing System Camalot/Speedline model 1818
Dispensing/Coating Equipment
Positive Displacement Dispense System
Sample Coaters
Metal Sputter
Manual Photoresist Coaters
Automatic Photoresist Coater System is designed exclusively to coat and bake substrates using spinning and heating techniques.
BLE was acquired by Suss Microtec
Manual Photoresist Developers
System is designed exclusively to develop and bake substrates using spinning and heating techniques
BLE was acquired by Suss Microtec
Manual Photoresist Coaters
Manual Photoresist Spin Coater
Manual Photoresist Developers
Scrubber/Hi Pressure Spray
Other Lithography Equipment
AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet
Last Time in production: 5/5/25
Contact: Agthen Robert (FE DRS P M2 MNT LIT)
Other Lithography Equipment
two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE
last time in production: 07.08.2024
Other Lithography Equipment
'- 12" Standard Wafer Chuck and 12" wafer handling system - SMIF type reticle loading ports and reticle changer unit- Pellicle Particle checker installed
- Hg-lamp will be rmoved prior shipping- Coolant will be removed prior shipping- all batteries will be removed prior shipping
Other Lithography Equipment
ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3