• Stainless steel, metal-sealed chamber engineered for ultra high vacuum applications.
• Previously used for ECR (electron cyclotron resonance) microwave plasma research.
• Large chamber ends are removable (via rigging hooks) to ease maintenance and enable significant changes in configuration. 

  SCALE REFERENCE: Open flange on left side of chamber in Image 2 is an 8" ConFlat. Please see images & other details in PDF posted under "Extended Description". 

Mask Aligner with IR Backside Alignment Quintel acquired by Neutronix

Dalsa Carrera Pellicle Camera

• For Puma Darkfield Inspection Tools
• KLA-Tencor Part No. 0074301-005

• Double-jacked water-cooled chamber intended for containment of 2.45GHz microwave plasma.
• Also available at Cline Innovations:
  • Associated microwave delivery hardware and power subsystems.
  • Associated electromagnetically-engineered stage hardware for water-cooled or RF-heated applications.

KLA-Tencor 52-0466 DBS Spectrometer Lid 

KLA-Tencor 51-0175, Rev. D H2 Wafer Handler Prealigner

KLA-Tencor ART Power Supply Module

• 3ea Available
• 1ea Refurbished 

Ceramic End Effector for Surfscan 6XX0 Tools