Inspection, Metrology & Test

  1. BioRad Q7/Q8 Overlay Metrology Tool

    Overlay Registration

    BioRad Q7/Q8 Overlay Metrology Tool

    Overlay Metrology Tool for up to 200mm Wafers
  2. BioRad Q5

    Overlay Registration

    BioRad Q5

    Overlay Registration Tool - Has Been Upgraded to a Q6 CD Measurement, Single and Two-Axis Overlay Registration
  3. KLA 2367 "Escape" Bright Field Inspection Tool

    Automatic Wafer Inspection Tools

    KLA 2367 "Escape" Bright Field Inspection Tool

    BrightField Inspektionstool 25 cassette HW 200mmGEM/SECS and HSMS ModelEnable .12 , .62, .39 Picels

    ORS Upgrade done 

    Tool currently full installed at cleanroom (estimated time depending on areaneed)

  4. KLA-Tencor 2138XP Brightfield Inspection Tool

    Automatic Wafer Inspection Tools

    KLA-Tencor 2138XP Brightfield Inspection Tool

    KLA-Tencor 2138XP Brightfield Defect Inspection Tool

    • 0.25µ, 0.39µ, 0.62µ Spot Sizes
    • For 150mm & 200mm Wafers
    • Model 2552UI User Interface
    • Denkenseiki Noise Filter
    • Please Inquire for Additional Details
  5. KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    Overlay Registration

    KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

    • ETAL Stage
    • Yaskawa Robot with NXC100 Controller
    • IDE Maxon 1000 Floatation Controller
  6. Nikon Optistation 3

    Automatic Wafer Inspection Tools

    Nikon Optistation 3

    Wafer Inspection Tool for 6" Wafers

  7. Nikon Optistation 3A

    Automatic Wafer Inspection Tools

    Nikon Optistation 3A

    Automatic Wafer Inspection Station