ADE Episcan 1000 Film Thickness Measurement & Mapping Tool

• Measurement of Epi Films <25µ
• ON-LINE TECHNOLOGIES 2110 Spectrometer Head
• IRVINE OPTICAL Nanoloader II Dual Cassette Wafer Handler
• ADE ACS Controller
• Windows NT Operating System
• Price.............................................................................$75,000.00
• As-Is Price....................................................................$40,000.00

X-Ray Fluoresence Spectrometer Model: TXRF 300S

UV-VIS-IR Spectrophotometer

FT-IR with Spectra-Tech Continuum Scope and TGA Interface Nicolet NEXUS 470

Nicolet acquired by Thermo Scientific

Accent  Optical Technologies QS-2200A FT-IR Spectrometer

• KBR Optical Components
• Reflective Measurement of Epitaxial Silicon Thickness
• Automatic Wafer Handling
  • Genmark Robot with Integrated Flatfinder & Controller
  • Dual Cassette Platforms for up to 200mm Wafers
  • ACCENT Robot Interface
  • ACCENT 013-4738-2 Stage Controller
  • ACCENT 013-4758-2 AC Power Box
  • Control PC Running Windows XP OS
  • ACCENT GUI Application Software
  • SECS/GEM Interface Software

Bio-Rad QS-500 FT-IR Spectrometer

• Transmissive & Reflective Film Measurement 
  • Si Epi Thickness, C & O in Si, BPSG Analysis
  • KBr Optical Components
  • Bio-Rad SPC 3200 Data Station
  • Upgradable to Computer Running Windows XP 
  • Bio-Rad 013-4100 Spectrometer Controller
  • Bio-Rad Stage Controller
  • Bio-Rad Robot Interface
  • Genmark Robot & Controller

BIORAD QS-1200 Automated FT-IR Spectrometer

• Non-Destructive Measurement of Epitaxial Silicon Films
• PIKE TECHNOLOGIES MAP300 Automatic Scanning Stage
  • Manual Loading for up to 300mm Wafers
  • 320 Test Points, 5mm Minimum Edge Exclusion & 3D Wafer Mapping
  • FTS-175 Optical Bench
    • Dynamically Tuned Beam Splitter
    • NKBr Beam Splitter
    • Dual Frequency IR Source
    • Upgraded HeNe Laser
    • System Control PC with Windows XP, 320G HD & 1G RAM
      • Win-IR Pro (Rev. 2.51) Application Software
      • QS-500 Epi (Rev. 1.31) Application Software
      • Microsoft Access Database Application
      • System Software, Applications Software & Site Preparation Manuals Included
      • Refurbished & Fully Functional